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Micro-Electro-Mechanical System

网络微机电系统；微电子机械系统；微电机系统

Micro-Electro-Mechanical System

Micro-Electro-Mechanical System

Micro-Electro-Mechanical System

微机电系统

微机电系统(micro-electro-mechanical system)，简称MEMS，为美国和日本所使用的名词，或称呼为微系统科技(micro-system-t…

微电子机械系统

半导体... ... Micro Mechanical Machining -- 微机械加工 Micro-Electro-Mechanical System -- 微电子机械系统 Memory -- 存储器 ...

微电机系统

...tor简称IMOD）所拼组，每一个调节器都是一个“微电机系统”（micro-electro-mechanical system）装置，用来驱动调节器，干 …

微奈米机电系统

本所课程 ... ‧微奈米机电系统 Micro-electro-mechanical System ‧分子动力学 Molecular Dynamics ...

微机电系统技术

MEMS是什么意思... ... Micro Electro Mechanical Sensor 微型机电传感器 Micro-Electro-Mechanical System 微机电系统技术 ...

微机系统

微机系统（Micro-Electro-Mechanical System） nanochem 2007-3-23 01097 nanochem 2007-3-23 23:17:53 有谁有VDMOS工 …

1

At present , the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics .

目前，微机电系统（MEMS ）作为致动器和传感器已被广泛应用于航空航天领域中。

2

Micro-electro-mechanical system (MEMS) is a new area which spring up a research upsurge in the internationality in recent years .

微电子机械系统（MEMS ）是近年来国际上兴起的一个新的研究领域，是新一轮技术产业革命。

3

Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system(MEMS) products .

微胶接技术非常适用于微机电系统产品的自动化装配过程。

4

The macro modeling method for Micro -electro-mechanical System (MEMS) devices is a key issue in the design and simulation of MEMS system .

器件宏模型技术是微机电（MEMS ）系统设计和系统级仿真的关键技术。

5

This paper introduced the design, fabrication and performance of some novel MEMS (micro electro-mechanical system ) optical switches .

介绍了几种新型微机电系统（MEMS ）光开关的设计、制造和性能。

6

8

Micro Electro -Mechanical System (MEMS) is a promising subject , and it is expected to have a huge market in the future .

微机电系统（MEMS ）是目前一个新兴的学科交叉领域，具有广泛的应用前景。

10

Free Vibration with Nonlinearity for a Resonator of Micro-electro-mechanical System

一种微电子机械系统共振器的非线性自由振动

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